An Optimized Adsorbent Sampling Combined to Thermal Desorption GC-MS Method for Trimethylsilanol in Industrial Environments

Trimethylsilanol (TMSOH) can cause damage to surfaces of scanner lenses in the semiconductor industry, and there is a critical need to measure and control airborne TMSOH concentrations. This study develops a thermal desorption (TD)-gas chromatography (GC)-mass spectrometry (MS) method for measuring...

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Detalles Bibliográficos
Autores principales: Lee, Jae Hwan, Jia, Chunrong, Kim, Yong Doo, Kim, Hong Hyun, Pham, Tien Thang, Choi, Young Seok, Seo, Young Un, Lee, Ike Woo
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Hindawi Publishing Corporation 2012
Materias:
Research Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3433126/
https://www.ncbi.nlm.nih.gov/pubmed/22966229
http://dx.doi.org/10.1155/2012/690356

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3433126/
https://www.ncbi.nlm.nih.gov/pubmed/22966229
http://dx.doi.org/10.1155/2012/690356

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