Prediction of Gap Asymmetry in Differential Micro Accelerometers

Gap asymmetry in differential capacitors is the primary source of the zero bias output of force-balanced micro accelerometers. It is also used to evaluate the applicability of differential structures in MEMS manufacturing. Therefore, determining the asymmetry level has considerable significance for...

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Detalles Bibliográficos
Autores principales: Zhou, Wu, Li, Baili, Peng, Bei, Su, Wei, He, Xiaoping
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2012
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3435955/
https://www.ncbi.nlm.nih.gov/pubmed/22969325
http://dx.doi.org/10.3390/s120606857

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3435955/
https://www.ncbi.nlm.nih.gov/pubmed/22969325
http://dx.doi.org/10.3390/s120606857

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