An Annular Mechanical Temperature Compensation Structure for Gas-Sealed Capacitive Pressure Sensor

A novel gas-sealed capacitive pressure sensor with a temperature compensation structure is reported. The pressure sensor is sealed by Au-Au diffusion bonding under a nitrogen ambient with a pressure of 100 kPa and integrated with a platinum resistor-based temperature sensor for human activity monito...

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Detalles Bibliográficos
Autores principales: Hao, Xiuchun, Jiang, Yonggang, Takao, Hidekuni, Maenaka, Kazusuke, Higuchi, Kohei
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2012
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3436014/
https://www.ncbi.nlm.nih.gov/pubmed/22969385
http://dx.doi.org/10.3390/s120608026

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3436014/
https://www.ncbi.nlm.nih.gov/pubmed/22969385
http://dx.doi.org/10.3390/s120608026

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