Analysis methods for meso- and macroporous silicon etching baths

Analysis methods for electrochemical etching baths consisting of various concentrations of hydrofluoric acid (HF) and an additional organic surface wetting agent are presented. These electrolytes are used for the formation of meso- and macroporous silicon. Monitoring the etching bath composition req...

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Detalles Bibliográficos
Autores principales: Nehmann, Julia B, Kajari-Schröder, Sarah, Bahnemann, Detlef W
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer 2012
Materias:
Nano Express
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3443038/
https://www.ncbi.nlm.nih.gov/pubmed/22805742
http://dx.doi.org/10.1186/1556-276X-7-398

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3443038/
https://www.ncbi.nlm.nih.gov/pubmed/22805742
http://dx.doi.org/10.1186/1556-276X-7-398

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