Development of An Automatic Approaching System for Electrochemical Nanofabrication Using Visual and Force-Displacement Sensing

In this paper, a fast automatic precision approaching system is developed for electrochemical nanofabrication using visual and force-displacement sensing. Before the substrate is fabricated, the template should approach the substrate accurately to establish the initial gap between the template and s...

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Detalles Bibliográficos
Autores principales: Lai, Lei-Jie, Zhou, Shi-Yu, Gu, Guo-Ying, Zhu, Li-Min
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2012
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3444058/
https://www.ncbi.nlm.nih.gov/pubmed/23012500
http://dx.doi.org/10.3390/s120708465

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3444058/
https://www.ncbi.nlm.nih.gov/pubmed/23012500
http://dx.doi.org/10.3390/s120708465

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