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Development of An Automatic Approaching System for Electrochemical Nanofabrication Using Visual and Force-Displacement Sensing
In this paper, a fast automatic precision approaching system is developed for electrochemical nanofabrication using visual and force-displacement sensing. Before the substrate is fabricated, the template should approach the substrate accurately to establish the initial gap between the template and s...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Molecular Diversity Preservation International (MDPI)
2012
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3444058/ https://www.ncbi.nlm.nih.gov/pubmed/23012500 http://dx.doi.org/10.3390/s120708465 |