Channeling in helium ion microscopy: Mapping of crystal orientation

Background: The unique surface sensitivity and the high resolution that can be achieved with helium ion microscopy make it a competitive technique for modern materials characterization. As in other techniques that make use of a charged particle beam, channeling through the crystal structure of the b...

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Detalles Bibliográficos
Autores principales: Veligura, Vasilisa, Hlawacek, Gregor, van Gastel, Raoul, Zandvliet, Harold J W, Poelsema, Bene
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Beilstein-Institut 2012
Materias:
Full Research Paper
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3458594/
https://www.ncbi.nlm.nih.gov/pubmed/23019544
http://dx.doi.org/10.3762/bjnano.3.57

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3458594/
https://www.ncbi.nlm.nih.gov/pubmed/23019544
http://dx.doi.org/10.3762/bjnano.3.57

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