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Channeling in helium ion microscopy: Mapping of crystal orientation
Background: The unique surface sensitivity and the high resolution that can be achieved with helium ion microscopy make it a competitive technique for modern materials characterization. As in other techniques that make use of a charged particle beam, channeling through the crystal structure of the b...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Beilstein-Institut
2012
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3458594/ https://www.ncbi.nlm.nih.gov/pubmed/23019544 http://dx.doi.org/10.3762/bjnano.3.57 |