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Synthesis and electrical characterization of intrinsic and in situ doped Si nanowires using a novel precursor
Perchlorinated polysilanes were synthesized by polymerization of tetrachlorosilane under cold plasma conditions with hydrogen as a reducing agent. Subsequent selective cleavage of the resulting polymer yielded oligochlorosilanes Si(n)Cl(2)(n)(+2) (n = 2, 3) from which the octachlorotrisilane (n = 3,...
Autores principales: | , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Beilstein-Institut
2012
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3458602/ https://www.ncbi.nlm.nih.gov/pubmed/23019552 http://dx.doi.org/10.3762/bjnano.3.65 |