Focused electron beam induced deposition: A perspective

Background: Focused electron beam induced deposition (FEBID) is a direct-writing technique with nanometer resolution, which has received strongly increasing attention within the last decade. In FEBID a precursor previously adsorbed on a substrate surface is dissociated in the focus of an electron be...

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Detalles Bibliográficos
Autores principales: Huth, Michael, Porrati, Fabrizio, Schwalb, Christian, Winhold, Marcel, Sachser, Roland, Dukic, Maja, Adams, Jonathan, Fantner, Georg
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Beilstein-Institut 2012
Materias:
Review
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3458607/
https://www.ncbi.nlm.nih.gov/pubmed/23019557
http://dx.doi.org/10.3762/bjnano.3.70

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3458607/
https://www.ncbi.nlm.nih.gov/pubmed/23019557
http://dx.doi.org/10.3762/bjnano.3.70

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