Metal electrode integration on macroporous silicon: pore distribution and morphology

In this work, a new approach for the one-step integration of interdigitated electrodes on macroporous silicon substrates is presented. Titanium/gold interdigitated electrodes are used to pattern p-type silicon substrates prior the anodization in an organic electrolyte. The electrolyte characteristic...

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Detalles Bibliográficos
Autores principales: Scheen, Gilles, Bassu, Margherita, Francis, Laurent A
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer 2012
Materias:
Nano Express
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3462733/
https://www.ncbi.nlm.nih.gov/pubmed/22799456
http://dx.doi.org/10.1186/1556-276X-7-395

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3462733/
https://www.ncbi.nlm.nih.gov/pubmed/22799456
http://dx.doi.org/10.1186/1556-276X-7-395

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