Triangle pore arrays fabricated on Si (111) substrate by sphere lithography combined with metal-assisted chemical etching and anisotropic chemical etching

The morphological change of silicon macropore arrays formed by metal-assisted chemical etching using shape-controlled Au thin film arrays was investigated during anisotropic chemical etching in tetramethylammonium hydroxide (TMAH) aqueous solution. After the deposition of Au as the etching catalyst...

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Detalles Bibliográficos
Autores principales: Asoh, Hidetaka, Fujihara, Kosuke, Ono, Sachiko
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer 2012
Materias:
Nano Express
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3466129/
https://www.ncbi.nlm.nih.gov/pubmed/22812920
http://dx.doi.org/10.1186/1556-276X-7-406

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3466129/
https://www.ncbi.nlm.nih.gov/pubmed/22812920
http://dx.doi.org/10.1186/1556-276X-7-406

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