Highly flexible method for the fabrication of photonic crystal slabs based on the selective formation of porous silicon

A novel fabrication method of Si photonic slabs based on the selective formation of porous silicon is reported. Free-standing square lattices of cylindrical air holes embedded in a Si matrix can be achieved by proton beam irradiation followed by electrochemical etching of Si wafers. The photonic ban...

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Detalles Bibliográficos
Autores principales: Recio-Sánchez, Gonzalo, Dang, Zhiya, Torres-Costa, Vicente, Breese, Mark BH, Martín-Palma, Raul-Jose
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer 2012
Materias:
Nano Express
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3467190/
https://www.ncbi.nlm.nih.gov/pubmed/22876764
http://dx.doi.org/10.1186/1556-276X-7-449

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3467190/
https://www.ncbi.nlm.nih.gov/pubmed/22876764
http://dx.doi.org/10.1186/1556-276X-7-449

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