Cargando…
Highly flexible method for the fabrication of photonic crystal slabs based on the selective formation of porous silicon
A novel fabrication method of Si photonic slabs based on the selective formation of porous silicon is reported. Free-standing square lattices of cylindrical air holes embedded in a Si matrix can be achieved by proton beam irradiation followed by electrochemical etching of Si wafers. The photonic ban...
| Autores principales: | , , , , |
|---|---|
| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Springer
2012
|
| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3467190/ https://www.ncbi.nlm.nih.gov/pubmed/22876764 http://dx.doi.org/10.1186/1556-276X-7-449 |