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'Wagon-wheel' mask as a tool to study anisotropy of porous silicon formation rate
Relationship between the rate of electrochemical formation of mesoporous Si and the crystallographic directions has been studied by local anodization of wafers through a mask having the form of narrow long wedges radiating from the center in all directions (‘wagon-wheel’ mask). The etching rates wer...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Springer
2012
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3488032/ https://www.ncbi.nlm.nih.gov/pubmed/22839661 http://dx.doi.org/10.1186/1556-276X-7-421 |