Two Dimensional Array of Piezoresistive Nanomechanical Membrane-Type Surface Stress Sensor(MSS) with Improved Sensitivity

We present a new generation of piezoresistive nanomechanical Membrane-type Surface stress Sensor(MSS) chips, which consist of a two dimensional array of MSS on a single chip. The implementation of several optimization techniques in the design and microfabrication improved the piezoresistive sensitiv...

Descripción completa

Detalles Bibliográficos
Autores principales: Yoshikawa, Genki, Akiyama, Terunobu, Loizeau, Frederic, Shiba, Kota, Gautsch, Sebastian, Nakayama, Tomonobu, Vettiger, Peter, de Rooij, Nico F., Aono, Masakazu
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2012
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3522990/
https://www.ncbi.nlm.nih.gov/pubmed/23202237
http://dx.doi.org/10.3390/s121115873

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3522990/
https://www.ncbi.nlm.nih.gov/pubmed/23202237
http://dx.doi.org/10.3390/s121115873

Ejemplares similares