Physically-Based Reduced Order Modelling of a Uni-Axial Polysilicon MEMS Accelerometer

In this paper, the mechanical response of a commercial off-the-shelf, uni-axial polysilicon MEMS accelerometer subject to drops is numerically investigated. To speed up the calculations, a simplified physically-based (beams and plate), two degrees of freedom model of the movable parts of the sensor...

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Detalles Bibliográficos
Autores principales: Ghisi, Aldo, Mariani, Stefano, Corigliano, Alberto, Zerbini, Sarah
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2012
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3545602/
https://www.ncbi.nlm.nih.gov/pubmed/23202031
http://dx.doi.org/10.3390/s121013985

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3545602/
https://www.ncbi.nlm.nih.gov/pubmed/23202031
http://dx.doi.org/10.3390/s121013985

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