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Physically-Based Reduced Order Modelling of a Uni-Axial Polysilicon MEMS Accelerometer
In this paper, the mechanical response of a commercial off-the-shelf, uni-axial polysilicon MEMS accelerometer subject to drops is numerically investigated. To speed up the calculations, a simplified physically-based (beams and plate), two degrees of freedom model of the movable parts of the sensor...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Molecular Diversity Preservation International (MDPI)
2012
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3545602/ https://www.ncbi.nlm.nih.gov/pubmed/23202031 http://dx.doi.org/10.3390/s121013985 |