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Discrete distribution of implanted and annealed arsenic atoms in silicon nanowires and its effect on device performance
We have theoretically investigated the effects of random discrete distribution of implanted and annealed arsenic (As) atoms on device characteristics of silicon nanowire (Si NW) transistors. Kinetic Monte Carlo simulation is used for generating realistic random distribution of active As atoms in Si...
Autores principales: | , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Springer
2012
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3552816/ https://www.ncbi.nlm.nih.gov/pubmed/23259464 http://dx.doi.org/10.1186/1556-276X-7-685 |