Structural and optical characterization of pure Si-rich nitride thin films

The specific dependence of the Si content on the structural and optical properties of O- and H-free Si-rich nitride (SiN(x>1.33)) thin films deposited by magnetron sputtering is investigated. A semiempirical relation between the composition and the refractive index was found. In the absence of Si...

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Detalles Bibliográficos
Autores principales: Debieu, Olivier, Nalini, Ramesh Pratibha, Cardin, Julien, Portier, Xavier, Perrière, Jacques, Gourbilleau, Fabrice
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer 2013
Materias:
Nano Express
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3563568/
https://www.ncbi.nlm.nih.gov/pubmed/23324447
http://dx.doi.org/10.1186/1556-276X-8-31

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3563568/
https://www.ncbi.nlm.nih.gov/pubmed/23324447
http://dx.doi.org/10.1186/1556-276X-8-31

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