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Structural and optical characterization of pure Si-rich nitride thin films
The specific dependence of the Si content on the structural and optical properties of O- and H-free Si-rich nitride (SiN(x>1.33)) thin films deposited by magnetron sputtering is investigated. A semiempirical relation between the composition and the refractive index was found. In the absence of Si...
| Autores principales: | , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Springer
2013
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3563568/ https://www.ncbi.nlm.nih.gov/pubmed/23324447 http://dx.doi.org/10.1186/1556-276X-8-31 |