Ordered arrays of nanoporous silicon nanopillars and silicon nanopillars with nanoporous shells

The fabrication of ordered arrays of nanoporous Si nanopillars with and without nanoporous base and ordered arrays of Si nanopillars with nanoporous shells are presented. The fabrication route is using a combination of substrate conformal imprint lithography and metal-assisted chemical etching. The...

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Detalles Bibliográficos
Autores principales: Wang, Dong, Ji, Ran, Du, Song, Albrecht, Arne, Schaaf, Peter
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer 2013
Materias:
Nano Express
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3570473/
https://www.ncbi.nlm.nih.gov/pubmed/23336430
http://dx.doi.org/10.1186/1556-276X-8-42

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3570473/
https://www.ncbi.nlm.nih.gov/pubmed/23336430
http://dx.doi.org/10.1186/1556-276X-8-42

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