Using an SU-8 Photoresist Structure and Cytochrome C Thin Film Sensing Material for a Microbolometer

There are two critical parameters for microbolometers: the temperature coefficient of resistance (TCR) of the sensing material, and the thermal conductance of the insulation structure. Cytochrome c protein, having a high TCR, is a good candidate for infrared detection. We can use SU-8 photoresist fo...

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Detalles Bibliográficos
Autores principales: Lai, Jian-Lun, Liao, Chien-Jen, Su, Guo-Dung John
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2012
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3571788/
https://www.ncbi.nlm.nih.gov/pubmed/23443384
http://dx.doi.org/10.3390/s121216390

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3571788/
https://www.ncbi.nlm.nih.gov/pubmed/23443384
http://dx.doi.org/10.3390/s121216390

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