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Using an SU-8 Photoresist Structure and Cytochrome C Thin Film Sensing Material for a Microbolometer
There are two critical parameters for microbolometers: the temperature coefficient of resistance (TCR) of the sensing material, and the thermal conductance of the insulation structure. Cytochrome c protein, having a high TCR, is a good candidate for infrared detection. We can use SU-8 photoresist fo...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Molecular Diversity Preservation International (MDPI)
2012
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3571788/ https://www.ncbi.nlm.nih.gov/pubmed/23443384 http://dx.doi.org/10.3390/s121216390 |