CMOS-MEMS Test-Key for Extracting Wafer-Level Mechanical Properties

This paper develops the technologies of mechanical characterization of CMOS-MEMS devices, and presents a robust algorithm for extracting mechanical properties, such as Young’s modulus, and mean stress, through the external electrical circuit behavior of the micro test-key. An approximate analytical...

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Detalles Bibliográficos
Autores principales: Chuang, Wan-Chun, Hu, Yuh-Chung, Chang, Pei-Zen
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2012
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3571828/
https://www.ncbi.nlm.nih.gov/pubmed/23235449
http://dx.doi.org/10.3390/s121217094

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3571828/
https://www.ncbi.nlm.nih.gov/pubmed/23235449
http://dx.doi.org/10.3390/s121217094

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