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Lamb Waves Propagation along 3C-SiC/AlN Membranes for Application in Temperature-Compensated, High-Sensitivity Gravimetric Sensors

The propagation of the fundamental quasi-symmetric Lamb mode S(0) travelling along 3C-SiC/c-AlN composite plates is theoretically studied with respect to the AlN and SiC film thickness, the acoustic wave propagation direction and the electrical boundary conditions. The temperature effects on the pha...

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Detalles Bibliográficos
Autores principales: Caliendo, Cinzia, D'Amico, Arnaldo, Castro, Fabio Lo
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2013
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3574690/
https://www.ncbi.nlm.nih.gov/pubmed/23282585
http://dx.doi.org/10.3390/s130100550