Monolithic Composite “Pressure + Acceleration + Temperature + Infrared” Sensor Using a Versatile Single-Sided “SiN/Poly-Si/Al” Process-Module

We report a newly developed design/fabrication module with low-cost single-sided “low-stress-silicon-nitride (LS-SiN)/polysilicon (poly-Si)/Al” process for monolithic integration of composite sensors for sensing-network-node applications. A front-side surface-/bulk-micromachining process on a conven...

Descripción completa

Detalles Bibliográficos
Autores principales: Ni, Zao, Yang, Chen, Xu, Dehui, Zhou, Hong, Zhou, Wei, Li, Tie, Xiong, Bin, Li, Xinxin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2013
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3574723/
https://www.ncbi.nlm.nih.gov/pubmed/23325169
http://dx.doi.org/10.3390/s130101085

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3574723/
https://www.ncbi.nlm.nih.gov/pubmed/23325169
http://dx.doi.org/10.3390/s130101085

Ejemplares similares