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Monolithic Composite “Pressure + Acceleration + Temperature + Infrared” Sensor Using a Versatile Single-Sided “SiN/Poly-Si/Al” Process-Module

We report a newly developed design/fabrication module with low-cost single-sided “low-stress-silicon-nitride (LS-SiN)/polysilicon (poly-Si)/Al” process for monolithic integration of composite sensors for sensing-network-node applications. A front-side surface-/bulk-micromachining process on a conven...

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Detalles Bibliográficos
Autores principales:	Ni, Zao, Yang, Chen, Xu, Dehui, Zhou, Hong, Zhou, Wei, Li, Tie, Xiong, Bin, Li, Xinxin
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2013
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3574723/ https://www.ncbi.nlm.nih.gov/pubmed/23325169 http://dx.doi.org/10.3390/s130101085

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