Oxidative and carbonaceous patterning of Si surface in an organic media by scanning probe lithography

A simple top-down fabrication technique that involves scanning probe lithography on Si is presented. The writing procedure consists of a chemically selective patterning in mesitylene. Operating in an organic media is possible to perform local oxidation or solvent decomposition during the same pass b...

Descripción completa

Detalles Bibliográficos
Autores principales: Lorenzoni, Matteo, Giugni, Andrea, Torre, Bruno
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer 2013
Materias:
Nano Express
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3576257/
https://www.ncbi.nlm.nih.gov/pubmed/23406405
http://dx.doi.org/10.1186/1556-276X-8-75

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3576257/
https://www.ncbi.nlm.nih.gov/pubmed/23406405
http://dx.doi.org/10.1186/1556-276X-8-75

Ejemplares similares