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Oxidative and carbonaceous patterning of Si surface in an organic media by scanning probe lithography
A simple top-down fabrication technique that involves scanning probe lithography on Si is presented. The writing procedure consists of a chemically selective patterning in mesitylene. Operating in an organic media is possible to perform local oxidation or solvent decomposition during the same pass b...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Springer
2013
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3576257/ https://www.ncbi.nlm.nih.gov/pubmed/23406405 http://dx.doi.org/10.1186/1556-276X-8-75 |