Growth of nanolaminate structure of tetragonal zirconia by pulsed laser deposition

Alumina/zirconia (Al(2)O(3)/ZrO(2)) multilayer thin films were deposited on Si (100) substrates at an optimized oxygen partial pressure of 3 Pa at room temperature by pulsed laser deposition. The Al(2)O(3)/ZrO(2) multilayers of 10:10, 5:10, 5:5, and 4:4 nm with 40 bilayers were deposited alternately...

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Detalles Bibliográficos
Autores principales: Balakrishnan, Govindasamy, Kuppusami, Parasuraman, Sastikumar, Dillibabu, Song, Jung Il
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer 2013
Materias:
Nano Express
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3579678/
https://www.ncbi.nlm.nih.gov/pubmed/23413942
http://dx.doi.org/10.1186/1556-276X-8-82

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3579678/
https://www.ncbi.nlm.nih.gov/pubmed/23413942
http://dx.doi.org/10.1186/1556-276X-8-82

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