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Growth of nanolaminate structure of tetragonal zirconia by pulsed laser deposition
Alumina/zirconia (Al(2)O(3)/ZrO(2)) multilayer thin films were deposited on Si (100) substrates at an optimized oxygen partial pressure of 3 Pa at room temperature by pulsed laser deposition. The Al(2)O(3)/ZrO(2) multilayers of 10:10, 5:10, 5:5, and 4:4 nm with 40 bilayers were deposited alternately...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Springer
2013
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3579678/ https://www.ncbi.nlm.nih.gov/pubmed/23413942 http://dx.doi.org/10.1186/1556-276X-8-82 |