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Scanning X-ray nanodiffraction: from the experimental approach towards spatially resolved scattering simulations

An enhancement on the method of X-ray diffraction simulations for applications using nanofocused hard X-ray beams is presented. We combine finite element method, kinematical scattering calculations, and a spot profile of the X-ray beam to simulate the diffraction of definite parts of semiconductor n...

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Detalles Bibliográficos
Autores principales: Dubslaff, Martin, Hanke, Michael, Patommel, Jens, Hoppe, Robert, Schroer, Christian G, Schöder, Sebastian, Burghammer, Manfred
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer 2012
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3583809/
https://www.ncbi.nlm.nih.gov/pubmed/23039065
http://dx.doi.org/10.1186/1556-276X-7-553