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Scanning X-ray nanodiffraction: from the experimental approach towards spatially resolved scattering simulations
An enhancement on the method of X-ray diffraction simulations for applications using nanofocused hard X-ray beams is presented. We combine finite element method, kinematical scattering calculations, and a spot profile of the X-ray beam to simulate the diffraction of definite parts of semiconductor n...
Autores principales: | Dubslaff, Martin, Hanke, Michael, Patommel, Jens, Hoppe, Robert, Schroer, Christian G, Schöder, Sebastian, Burghammer, Manfred |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Springer
2012
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3583809/ https://www.ncbi.nlm.nih.gov/pubmed/23039065 http://dx.doi.org/10.1186/1556-276X-7-553 |
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