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Growth of low temperature silicon nano-structures for electronic and electrical energy generation applications
This paper represents the lowest growth temperature for silicon nano-wires (SiNWs) via a vapour-liquid–solid method, which has ever been reported in the literature. The nano-wires were grown using plasma-enhanced chemical vapour deposition technique at temperatures as low as 150°C using gallium as t...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Springer
2013
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3586344/ https://www.ncbi.nlm.nih.gov/pubmed/23413969 http://dx.doi.org/10.1186/1556-276X-8-83 |