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Impact of oxidation and reduction annealing on the electrical properties of Ge/La(2)O(3)/ZrO(2) gate stacks
The paper addresses the passivation of Germanium surfaces by using layered La(2)O(3)/ZrO(2) high-k dielectrics deposited by Atomic Layer Deposition to be applied in Ge-based MOSFET devices. Improved electrical properties of these multilayered gate stacks exposed to oxidizing and reducing ambient dur...
Autores principales: | , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Pergamon Press
2012
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3587347/ https://www.ncbi.nlm.nih.gov/pubmed/23483756 http://dx.doi.org/10.1016/j.sse.2012.04.004 |