Cargando…
Effects of post-deposition annealing ambient on band alignment of RF magnetron-sputtered Y(2)O(3) film on gallium nitride
The effects of different post-deposition annealing ambients (oxygen, argon, forming gas (95% N(2) + 5% H(2)), and nitrogen) on radio frequency magnetron-sputtered yttrium oxide (Y(2)O(3)) films on n-type gallium nitride (GaN) substrate were studied in this work. X-ray photoelectron spectroscopy was...
| Autores principales: | , |
|---|---|
| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Springer
2013
|
| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3598984/ https://www.ncbi.nlm.nih.gov/pubmed/23360596 http://dx.doi.org/10.1186/1556-276X-8-53 |