Correlation between matrix structural order and compressive stress exerted on silicon nanocrystals embedded in silicon-rich silicon oxide

ABSTRACT: Silicon nanocrystals embedded in a silicon oxide matrix were deposited by radio frequency reactive magnetron sputtering. By means of Raman spectroscopy, we have found that a compressive stress is exerted on the silicon nanocrystal cores. The stress varies as a function of silicon concentra...

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Detalles Bibliográficos
Autores principales: Zatryb, Grzegorz, Podhorodecki, Artur, Misiewicz, Jan, Cardin, Julien, Gourbilleau, Fabrice
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer 2013
Materias:
Nano Express
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3605160/
https://www.ncbi.nlm.nih.gov/pubmed/23336352
http://dx.doi.org/10.1186/1556-276X-8-40

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3605160/
https://www.ncbi.nlm.nih.gov/pubmed/23336352
http://dx.doi.org/10.1186/1556-276X-8-40

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