Correlation between matrix structural order and compressive stress exerted on silicon nanocrystals embedded in silicon-rich silicon oxide

ABSTRACT: Silicon nanocrystals embedded in a silicon oxide matrix were deposited by radio frequency reactive magnetron sputtering. By means of Raman spectroscopy, we have found that a compressive stress is exerted on the silicon nanocrystal cores. The stress varies as a function of silicon concentra...

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Autores principales: Zatryb, Grzegorz, Podhorodecki, Artur, Misiewicz, Jan, Cardin, Julien, Gourbilleau, Fabrice
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer 2013
Materias:
Nano Express
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3605160/
https://www.ncbi.nlm.nih.gov/pubmed/23336352
http://dx.doi.org/10.1186/1556-276X-8-40
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author Zatryb, Grzegorz
Podhorodecki, Artur
Misiewicz, Jan
Cardin, Julien
Gourbilleau, Fabrice
author_facet Zatryb, Grzegorz
Podhorodecki, Artur
Misiewicz, Jan
Cardin, Julien
Gourbilleau, Fabrice
author_sort Zatryb, Grzegorz
collection PubMed
description ABSTRACT: Silicon nanocrystals embedded in a silicon oxide matrix were deposited by radio frequency reactive magnetron sputtering. By means of Raman spectroscopy, we have found that a compressive stress is exerted on the silicon nanocrystal cores. The stress varies as a function of silicon concentration in the silicon-rich silicon oxide layers varies, which can be attributed to changes of nanocrystal environment. By conducting the Fourier transform infrared absorption experiments, we have correlated the stresses exerted on the nanocrystal core to the degree of matrix structural order. PACS: 78.67.Bf, 78.67.Pt, 73.63.Bd, 78.47.D, 74.25.Nd
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spelling pubmed-36051602013-03-25 Correlation between matrix structural order and compressive stress exerted on silicon nanocrystals embedded in silicon-rich silicon oxide Zatryb, Grzegorz Podhorodecki, Artur Misiewicz, Jan Cardin, Julien Gourbilleau, Fabrice Nanoscale Res Lett Nano Express ABSTRACT: Silicon nanocrystals embedded in a silicon oxide matrix were deposited by radio frequency reactive magnetron sputtering. By means of Raman spectroscopy, we have found that a compressive stress is exerted on the silicon nanocrystal cores. The stress varies as a function of silicon concentration in the silicon-rich silicon oxide layers varies, which can be attributed to changes of nanocrystal environment. By conducting the Fourier transform infrared absorption experiments, we have correlated the stresses exerted on the nanocrystal core to the degree of matrix structural order. PACS: 78.67.Bf, 78.67.Pt, 73.63.Bd, 78.47.D, 74.25.Nd Springer 2013-01-21 /pmc/articles/PMC3605160/ /pubmed/23336352 http://dx.doi.org/10.1186/1556-276X-8-40 Text en Copyright ©2013 Zatryb et al; licensee Springer. http://creativecommons.org/licenses/by/2.0 This is an Open Access article distributed under the terms of the Creative Commons Attribution License (http://creativecommons.org/licenses/by/2.0), which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
spellingShingle Nano Express
Zatryb, Grzegorz
Podhorodecki, Artur
Misiewicz, Jan
Cardin, Julien
Gourbilleau, Fabrice
Correlation between matrix structural order and compressive stress exerted on silicon nanocrystals embedded in silicon-rich silicon oxide
title Correlation between matrix structural order and compressive stress exerted on silicon nanocrystals embedded in silicon-rich silicon oxide
title_full Correlation between matrix structural order and compressive stress exerted on silicon nanocrystals embedded in silicon-rich silicon oxide
title_fullStr Correlation between matrix structural order and compressive stress exerted on silicon nanocrystals embedded in silicon-rich silicon oxide
title_full_unstemmed Correlation between matrix structural order and compressive stress exerted on silicon nanocrystals embedded in silicon-rich silicon oxide
title_short Correlation between matrix structural order and compressive stress exerted on silicon nanocrystals embedded in silicon-rich silicon oxide
title_sort correlation between matrix structural order and compressive stress exerted on silicon nanocrystals embedded in silicon-rich silicon oxide
topic Nano Express
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3605160/
https://www.ncbi.nlm.nih.gov/pubmed/23336352
http://dx.doi.org/10.1186/1556-276X-8-40
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