Maskless and low-destructive nanofabrication on quartz by friction-induced selective etching

A low-destructive friction-induced nanofabrication method is proposed to produce three-dimensional nanostructures on a quartz surface. Without any template, nanofabrication can be achieved by low-destructive scanning on a target area and post-etching in a KOH solution. Various nanostructures, such a...

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Detalles Bibliográficos
Autores principales: Song, Chenfei, Li, Xiaoying, Cui, Shuxun, Dong, Hanshan, Yu, Bingjun, Qian, Linmao
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer 2013
Materias:
Nano Express
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3620578/
https://www.ncbi.nlm.nih.gov/pubmed/23531381
http://dx.doi.org/10.1186/1556-276X-8-140

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3620578/
https://www.ncbi.nlm.nih.gov/pubmed/23531381
http://dx.doi.org/10.1186/1556-276X-8-140

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