Investigation into Mass Loading Sensitivity of Sezawa Wave Mode-Based Surface Acoustic Wave Sensors

In this work mass loading sensitivity of a Sezawa wave mode based surface acoustic wave (SAW) device is investigated through finite element method (FEM) simulation and the prospects of these devices to function as highly sensitive SAW sensors is reported. A ZnO/Si layered SAW resonator is considered...

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Detalles Bibliográficos
Autores principales: Mohanan, Ajay Achath, Islam, Md Shabiul, Ali, Sawal Hamid Md, Parthiban, R., Ramakrishnan, N.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2013
Materias:
Communication
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3649373/
https://www.ncbi.nlm.nih.gov/pubmed/23389346
http://dx.doi.org/10.3390/s130202164

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3649373/
https://www.ncbi.nlm.nih.gov/pubmed/23389346
http://dx.doi.org/10.3390/s130202164

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