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Investigation into Mass Loading Sensitivity of Sezawa Wave Mode-Based Surface Acoustic Wave Sensors

In this work mass loading sensitivity of a Sezawa wave mode based surface acoustic wave (SAW) device is investigated through finite element method (FEM) simulation and the prospects of these devices to function as highly sensitive SAW sensors is reported. A ZnO/Si layered SAW resonator is considered...

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Autores principales: Mohanan, Ajay Achath, Islam, Md Shabiul, Ali, Sawal Hamid Md, Parthiban, R., Ramakrishnan, N.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2013
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3649373/
https://www.ncbi.nlm.nih.gov/pubmed/23389346
http://dx.doi.org/10.3390/s130202164
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author Mohanan, Ajay Achath
Islam, Md Shabiul
Ali, Sawal Hamid Md
Parthiban, R.
Ramakrishnan, N.
author_facet Mohanan, Ajay Achath
Islam, Md Shabiul
Ali, Sawal Hamid Md
Parthiban, R.
Ramakrishnan, N.
author_sort Mohanan, Ajay Achath
collection PubMed
description In this work mass loading sensitivity of a Sezawa wave mode based surface acoustic wave (SAW) device is investigated through finite element method (FEM) simulation and the prospects of these devices to function as highly sensitive SAW sensors is reported. A ZnO/Si layered SAW resonator is considered for the simulation study. Initially the occurrence of Sezawa wave mode and displacement amplitude of the Rayleigh and Sezawa wave mode is studied for lower ZnO film thickness. Further, a thin film made of an arbitrary material is coated over the ZnO surface and the resonance frequency shift caused by mass loading of the film is estimated. It was observed that Sezawa wave mode shows significant sensitivity to change in mass loading and has higher sensitivity (eight times higher) than Rayleigh wave mode for the same device configuration. Further, the mass loading sensitivity was observed to be greater for a low ZnO film thickness to wavelength ratio. Accordingly, highly sensitive SAW sensors can be developed by coating a sensing medium over a layered SAW device and operating at Sezawa mode resonance frequency. The sensitivity can be increased by tuning the ZnO film thickness to wavelength ratio.
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spelling pubmed-36493732013-06-04 Investigation into Mass Loading Sensitivity of Sezawa Wave Mode-Based Surface Acoustic Wave Sensors Mohanan, Ajay Achath Islam, Md Shabiul Ali, Sawal Hamid Md Parthiban, R. Ramakrishnan, N. Sensors (Basel) Communication In this work mass loading sensitivity of a Sezawa wave mode based surface acoustic wave (SAW) device is investigated through finite element method (FEM) simulation and the prospects of these devices to function as highly sensitive SAW sensors is reported. A ZnO/Si layered SAW resonator is considered for the simulation study. Initially the occurrence of Sezawa wave mode and displacement amplitude of the Rayleigh and Sezawa wave mode is studied for lower ZnO film thickness. Further, a thin film made of an arbitrary material is coated over the ZnO surface and the resonance frequency shift caused by mass loading of the film is estimated. It was observed that Sezawa wave mode shows significant sensitivity to change in mass loading and has higher sensitivity (eight times higher) than Rayleigh wave mode for the same device configuration. Further, the mass loading sensitivity was observed to be greater for a low ZnO film thickness to wavelength ratio. Accordingly, highly sensitive SAW sensors can be developed by coating a sensing medium over a layered SAW device and operating at Sezawa mode resonance frequency. The sensitivity can be increased by tuning the ZnO film thickness to wavelength ratio. Molecular Diversity Preservation International (MDPI) 2013-02-06 /pmc/articles/PMC3649373/ /pubmed/23389346 http://dx.doi.org/10.3390/s130202164 Text en © 2013 by the authors; licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution license (http://creativecommons.org/licenses/by/3.0/).
spellingShingle Communication
Mohanan, Ajay Achath
Islam, Md Shabiul
Ali, Sawal Hamid Md
Parthiban, R.
Ramakrishnan, N.
Investigation into Mass Loading Sensitivity of Sezawa Wave Mode-Based Surface Acoustic Wave Sensors
title Investigation into Mass Loading Sensitivity of Sezawa Wave Mode-Based Surface Acoustic Wave Sensors
title_full Investigation into Mass Loading Sensitivity of Sezawa Wave Mode-Based Surface Acoustic Wave Sensors
title_fullStr Investigation into Mass Loading Sensitivity of Sezawa Wave Mode-Based Surface Acoustic Wave Sensors
title_full_unstemmed Investigation into Mass Loading Sensitivity of Sezawa Wave Mode-Based Surface Acoustic Wave Sensors
title_short Investigation into Mass Loading Sensitivity of Sezawa Wave Mode-Based Surface Acoustic Wave Sensors
title_sort investigation into mass loading sensitivity of sezawa wave mode-based surface acoustic wave sensors
topic Communication
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3649373/
https://www.ncbi.nlm.nih.gov/pubmed/23389346
http://dx.doi.org/10.3390/s130202164
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