Energy Harvesting Thermoelectric Generators Manufactured Using the Complementary Metal Oxide Semiconductor Process

This paper presents the fabrication and characterization of energy harvesting thermoelectric micro generators using the commercial complementary metal oxide semiconductor (CMOS) process. The micro generator consists of 33 thermocouples in series. Thermocouple materials are p-type and n-type polysili...

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Detalles Bibliográficos
Autores principales: Yang, Ming-Zhi, Wu, Chyan-Chyi, Dai, Ching-Liang, Tsai, Wen-Jung
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2013
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3649392/
https://www.ncbi.nlm.nih.gov/pubmed/23396193
http://dx.doi.org/10.3390/s130202359

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3649392/
https://www.ncbi.nlm.nih.gov/pubmed/23396193
http://dx.doi.org/10.3390/s130202359

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