A MEMS Device Capable of Measuring Near-Field Thermal Radiation between Membranes

For sensors constructed by freestanding membranes, when the gap between a freestanding membrane and the substrate or between membranes is at micron scale, the effects of near-field radiative heat transfer on the sensors' thermal performance should be considered during sensor design. The radiati...

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Detalles Bibliográficos
Autores principales: Feng, Chong, Tang, Zhenan, Yu, Jun, Sun, Changyu
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2013
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3649438/
https://www.ncbi.nlm.nih.gov/pubmed/23385413
http://dx.doi.org/10.3390/s130201998

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3649438/
https://www.ncbi.nlm.nih.gov/pubmed/23385413
http://dx.doi.org/10.3390/s130201998

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