5A Zirconium Dioxide Ammonia Microsensor Integrated with a Readout Circuit Manufactured Using the 0.18 μm CMOS Process

The study presents an ammonia microsensor integrated with a readout circuit on-a-chip fabricated using the commercial 0.18 μm complementary metal oxide semiconductor (CMOS) process. The integrated sensor chip consists of a heater, an ammonia sensor and a readout circuit. The ammonia sensor is constr...

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Detalles Bibliográficos
Autores principales: Lin, Guan-Ming, Dai, Ching-Liang, Yang, Ming-Zhi
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2013
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3658768/
https://www.ncbi.nlm.nih.gov/pubmed/23503294
http://dx.doi.org/10.3390/s130303664

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3658768/
https://www.ncbi.nlm.nih.gov/pubmed/23503294
http://dx.doi.org/10.3390/s130303664

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