Cargando…
Highly organised and dense vertical silicon nanowire arrays grown in porous alumina template on <100> silicon wafers
In this work, nanoimprint lithography combined with standard anodization etching is used to make perfectly organised triangular arrays of vertical cylindrical alumina nanopores onto standard <100>−oriented silicon wafers. Both the pore diameter and the period of alumina porous array are well c...
| Autores principales: | , , , , , |
|---|---|
| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Springer
2013
|
| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3686656/ https://www.ncbi.nlm.nih.gov/pubmed/23773702 http://dx.doi.org/10.1186/1556-276X-8-287 |