Design and Characterization of a Fully Differential MEMS Accelerometer Fabricated Using MetalMUMPs Technology

This paper presents a fully differential single-axis accelerometer fabricated using the MetalMUMPs process. The unique structural configuration and common-centriod wiring of the metal electrodes enables a fully differential sensing scheme with robust metal sensing structures. CoventorWare is used in...

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Detalles Bibliográficos
Autores principales: Qu, Peng, Qu, Hongwei
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2013
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3690025/
https://www.ncbi.nlm.nih.gov/pubmed/23645109
http://dx.doi.org/10.3390/s130505720

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3690025/
https://www.ncbi.nlm.nih.gov/pubmed/23645109
http://dx.doi.org/10.3390/s130505720

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