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Design and Characterization of a Fully Differential MEMS Accelerometer Fabricated Using MetalMUMPs Technology
This paper presents a fully differential single-axis accelerometer fabricated using the MetalMUMPs process. The unique structural configuration and common-centriod wiring of the metal electrodes enables a fully differential sensing scheme with robust metal sensing structures. CoventorWare is used in...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Molecular Diversity Preservation International (MDPI)
2013
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3690025/ https://www.ncbi.nlm.nih.gov/pubmed/23645109 http://dx.doi.org/10.3390/s130505720 |