Fabrication of Ni-silicide/Si heterostructured nanowire arrays by glancing angle deposition and solid state reaction

This work develops a method for growing Ni-silicide/Si heterostructured nanowire arrays by glancing angle Ni deposition and solid state reaction on ordered Si nanowire arrays. Samples of ordered Si nanowire arrays were fabricated by nanosphere lithography and metal-induced catalytic etching. Glancin...

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Detalles Bibliográficos
Autores principales: Hsu, Hsun-Feng, Huang, Wan-Ru, Chen, Ting-Hsuan, Wu, Hwang-Yuan, Chen, Chun-An
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer 2013
Materias:
Nano Express
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3695794/
https://www.ncbi.nlm.nih.gov/pubmed/23663726
http://dx.doi.org/10.1186/1556-276X-8-224

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3695794/
https://www.ncbi.nlm.nih.gov/pubmed/23663726
http://dx.doi.org/10.1186/1556-276X-8-224

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