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Fabrication of Ni-silicide/Si heterostructured nanowire arrays by glancing angle deposition and solid state reaction
This work develops a method for growing Ni-silicide/Si heterostructured nanowire arrays by glancing angle Ni deposition and solid state reaction on ordered Si nanowire arrays. Samples of ordered Si nanowire arrays were fabricated by nanosphere lithography and metal-induced catalytic etching. Glancin...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Springer
2013
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3695794/ https://www.ncbi.nlm.nih.gov/pubmed/23663726 http://dx.doi.org/10.1186/1556-276X-8-224 |